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Fabrication of carbon nanofibrous microelectrode array (CNF-MEA) using nanofiber immersion photolithography

dc.creatorJao, P.F.
dc.creatorFranca E.
dc.creatorFang S.-P.
dc.creatorYoon J.
dc.creatorCho K.
dc.creatorDavid Sr. E.
dc.creatorKim G.
dc.creatorWheeler B.
dc.creatorYoon, Y.K.
dc.date.accessioned2020-03-26T16:32:52Z
dc.date.available2020-03-26T16:32:52Z
dc.date.issued2014
dc.identifier.citationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); pp. 498-501
dc.identifier.isbn9781479935086
dc.identifier.issn10846999
dc.identifier.urihttps://hdl.handle.net/20.500.12585/9064
dc.description.abstractMicroelectrode arrays (MEAs) are widely used for stimulating and receiving electrical signals between human and machines and for in vitro neural study. This work demonstrates the fabrication process of nanofibrous 3D microelectrodes using immersion lithography. Oil immersion negates the diffraction effects intrinsic in the photopatterning of electrospun nanofibers to give increased aspect ratio microarchitectures. Nanofiber electrode resistivity is characterized and its performance compared to that of carbon thin film. In vitro testing of electrodes are performed using E18 cortical neurons and analyzed for cell density and cell viability. © 2014 IEEE.eng
dc.description.sponsorshipIEEE Robotics and Automation Society
dc.format.mediumRecurso electrónico
dc.format.mimetypeapplication/pdf
dc.language.isoeng
dc.publisherInstitute of Electrical and Electronics Engineers Inc.
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/
dc.sourcehttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84898986904&doi=10.1109%2fMEMSYS.2014.6765686&partnerID=40&md5=b0aff0951c95992ee9646572180e0591
dc.sourceScopus2-s2.0-84898986904
dc.titleFabrication of carbon nanofibrous microelectrode array (CNF-MEA) using nanofiber immersion photolithography
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datacite.rightshttp://purl.org/coar/access_right/c_16ec
oaire.resourceTypehttp://purl.org/coar/resource_type/c_c94f
oaire.versionhttp://purl.org/coar/version/c_970fb48d4fbd8a85
dc.source.event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
dc.type.driverinfo:eu-repo/semantics/conferenceObject
dc.type.hasversioninfo:eu-repo/semantics/publishedVersion
dc.identifier.doi10.1109/MEMSYS.2014.6765686
dc.subject.keywordsAspect ratio
dc.subject.keywordsCarbon
dc.subject.keywordsMEMS
dc.subject.keywordsMicroelectrodes
dc.subject.keywordsPhotolithography
dc.subject.keywordsDiffraction effects
dc.subject.keywordsElectrical signal
dc.subject.keywordsElectrospun nanofibers
dc.subject.keywordsFabrication process
dc.subject.keywordsImmersion Lithography
dc.subject.keywordsImmersion photolithography
dc.subject.keywordsMicro architectures
dc.subject.keywordsMicroelectrode array
dc.subject.keywordsNanofibers
dc.rights.accessrightsinfo:eu-repo/semantics/restrictedAccess
dc.rights.ccAtribución-NoComercial 4.0 Internacional
dc.identifier.instnameUniversidad Tecnológica de Bolívar
dc.identifier.reponameRepositorio UTB
dc.relation.conferenceplaceSan Francisco, CA
dc.relation.conferencedate26 January 2014 through 30 January 2014
dc.type.spaConferencia
dc.identifier.orcid36698143800
dc.identifier.orcid47461221100
dc.identifier.orcid55369366700
dc.identifier.orcid57188967902
dc.identifier.orcid57195449649
dc.identifier.orcid11338989900
dc.identifier.orcid8617217000
dc.identifier.orcid7102861016
dc.identifier.orcid7402126778


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Universidad Tecnológica de Bolívar - 2017 Institución de Educación Superior sujeta a inspección y vigilancia por el Ministerio de Educación Nacional. Resolución No 961 del 26 de octubre de 1970 a través de la cual la Gobernación de Bolívar otorga la Personería Jurídica a la Universidad Tecnológica de Bolívar.