2020-03-262020-03-262014Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); pp. 498-501978147993508610846999https://hdl.handle.net/20.500.12585/9064Microelectrode arrays (MEAs) are widely used for stimulating and receiving electrical signals between human and machines and for in vitro neural study. This work demonstrates the fabrication process of nanofibrous 3D microelectrodes using immersion lithography. Oil immersion negates the diffraction effects intrinsic in the photopatterning of electrospun nanofibers to give increased aspect ratio microarchitectures. Nanofiber electrode resistivity is characterized and its performance compared to that of carbon thin film. In vitro testing of electrodes are performed using E18 cortical neurons and analyzed for cell density and cell viability. © 2014 IEEE.Recurso electrónicoapplication/pdfenghttp://creativecommons.org/licenses/by-nc-nd/4.0/info:eu-repo/semantics/conferenceObject10.1109/MEMSYS.2014.6765686Aspect ratioCarbonMEMSMicroelectrodesPhotolithographyDiffraction effectsElectrical signalElectrospun nanofibersFabrication processImmersion LithographyImmersion photolithographyMicro architecturesMicroelectrode arrayNanofibersinfo:eu-repo/semantics/restrictedAccessAtribución-NoComercial 4.0 InternacionalUniversidad Tecnológica de BolívarRepositorio UTB366981438004746122110055369366700571889679025719544964911338989900861721700071028610167402126778