2020-03-262020-03-2620112011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11; pp. 2014-20179781457701573https://hdl.handle.net/20.500.12585/9110In this work, an evanescent mode half mode substrate integrated waveguide (HMSIW) resonator is designed for a wireless passive sensing application at 5 GHz. The wireless pressure sensor has been implemented by placing a small Polydimethylsiloxane (PDMS) cavity, covered with a metal coated membrane, on top of the original resonator or by using a cavity ground plane. When the metal coated membrane is deformed or deflected by an external pressure, it perturbs the electric field of a complementary split ring resonator (CSRR) patterned on top of the HMSIW, producing a shift in the resonance frequency. Because it operates in a microwave frequency spectrum, it offers a high pressure-frequency sensitivity. Resonance frequency as a function of an applied pressure has been presented. Also, a broadband antenna has been integrated to perform wireless interrogation of the sensor. © 2011 IEEE.Recurso electrónicoapplication/pdfenghttp://creativecommons.org/licenses/by-nc-nd/4.0/Wireless passive sensing application using a cavity loaded evanescent mode half mode substrate integrated waveguide resonatorinfo:eu-repo/semantics/conferenceObject10.1109/TRANSDUCERS.2011.5969205Complementary split ring resonatorElectromagnetic transductionHalf mode substrate integrated waveguidePassive SensorsApplied pressureBroad-band antennaComplementary split ring resonatorsComplementary split-ring resonatorElectromagnetic transductionEvanescent modeExternal pressuresGround planesHalf-mode substrate integrated waveguidesMetal-coatedPassive sensingPassive sensorPolydimethylsiloxane PDMSResonance frequenciesWireless pressure sensorsActuatorsAntennasElectric fieldsMetal coatingsMicrosystemsMicrowave circuitsNatural frequenciesOptical resonatorsSiliconesSolid-state sensorsSpectroscopySubstrate integrated waveguidesinfo:eu-repo/semantics/restrictedAccessAtribución-NoComercial 4.0 InternacionalUniversidad Tecnológica de BolívarRepositorio UTB366984276003710122720036698143800560212187005721161618957207231431